VEgauge

Overview

VEgauge is a fully customizable inline inspection system for macroscopic and microscopic surface inspection. It provides spatial resolution from sub-µm up to the meter range, with field of view, sample size, and system dimensions defined by the production setup. The system delivers near real-time evaluation for fast process feedback and performs non-destructive, full-surface (100%) inspection of thin films, defects, contaminations, and surface roughness. Layer analysis is supported from 1 nm to 500 µm and can be configured for the specific material stack, with substrate-specific calibration for semiconductors, metals, polymers, ceramics, glass and more. VEgauge is scalable for parallel production lines, can be deployed multiple times with individual configurations, supports seamless integration into existing production workflows, and offers centralised data management and control via VEsolve® pro software. Technical data: Measurement mode: Reflectance. Measurement time: Based on sample sizes and manufacturing process. Wavelength range: VNIR: 400-1,000 nm | SWIR: 900 – 1,700 nm. Spectral resolution: VNIR: 1.34 nm | SWIR: 3.5 nm. VEgauge is used for inline, non-destructive, full-surface (100%) inspection to identify thin film defects, contaminations, and to assess surface roughness with near real-time evaluation for fast process feedback. It supports layer thickness analysis from 1 nm to 500 µm and provides substrate-specific calibrated measurements for semiconductors, metals, polymers, ceramics, glass and more. The system can be scaled across parallel production lines with individual configurations and managed centrally via VEsolve® pro software.