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Angstrom Engineering Inc.Box Coater

Box Coater

Angstrom Engineering Inc.

Categories:
Batch Sputtering Systems
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Model Overview

Box Coater is a configurable PVD vacuum coating system designed to process 100 mm – 1200 mm substrates and to support a wide variety of thin-film deposition processes. The system can be outfitted to achieve ultra-high vacuum (UHV) where contamination-sensitive films are required. Sputtering options...

Technical Specifications

SputteringRF, DC, pulsed DC, HIPIMS, and reactive. Circular, linear & cylindrical cathodes are available.
Uhv OptionOption to be outfitted to achieve ultra-high vacuum (UHV)
Plasma & Ion BeamA range of ion sources for cleaning and film enhancements, including glow discharge plasma cleaning.
Processes SupportedWide variety of PVD processes
Thermal EvaporationUtilize a wide range of boats, filaments & crucible heaters. Auto-tuning for precise rate control.

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