DOMINO micra

Overview

DOMINO micra is a compact and versatile equipment for a customised PVD solution and is described as meeting the requirements of almost all challenges on one platform. It allows a wide variety of technology according to customer requirements and is noted as a perfect platform, especially as a HiPIMS system. Usable coating volume: Ø 450 mm x 500 mm. Available coating modules: Arc, Sputter, HiPIMS, HI3, Nitriding. APA arc evaporators: 3 to 12; magnetron sputter sources: 1 to 4. Available power supplies: DC, DC pulse, middle frequency (MF), HiPIMS, (RF upon request). Available BIAS: Bipolar pulse, middle frequency. All systems are equipped with patented power etching process AEGD for plasma cleaning. Standard substrate table (others upon request): 6 shafts. The DOMINO micra is presented for customised PVD solutions and is highlighted as a platform especially suited for HiPIMS sputtering. It supports APA arc evaporation, HiPIMS sputtering, HI3 technology and combinations with PACVD and a nitriding process, and it can be retrofitted with various technologies depending on customer requirements.