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ALLIANCE CONCEPTResidual Gas Analysis System

Residual Gas Analysis System

ALLIANCE CONCEPT

Categories:
Spectrometry & Spectroscopy Systems
Equipment

Model Overview

Residual Gas Analysis System is equipment for residual gas analysis and described as a robust partner for processes that require a degassing step with analysis of the residual gases. The equipment emphasizes optimized cost, simplicity, a rational design and ergonomic loading from the top, and is pr...

Technical Specifications

Heating:Reinforced stiff collar
Chamber Diameter:150 mm
Load-lock Chamber:Possible ( [contact-us](https://www.alliance-concept.com/en/contact.html))
Mass Spectrometer:e.g. Pfeiffer PrismaPlus™ QMG 220
Equipment Capacity:e.g. Stainless steel multi-stage substrate rack for 50×50 substrate

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