On-Board® IS Cryopumps

Overview

On-Board® IS Cryopumps are Edwards CTI-Cryogenics systems that leverage innovative, high-efficiency cryogenics technology to provide unparalleled vacuum performance and energy efficiency. A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency. On-Board IS cryopumps deliver the highest uptime, best productivity, and lowest overall cost of ownership of any cryopump system available today, backed by Edwards highly responsive global service and support network. - The patented distributed control system monitors and constantly adjusts individual elements of the cryopump system - Maintains optimal system-wide vacuum performance, delivering exceptional process consistency - Quickest regenerations in single and multi-pump configurations - Low consumption of energy and cooling water with no compromise in vacuum performance - Easy system integration - Fast production installation - Enhanced remote monitoring for both preventive and predictive maintenance The On-Board® IS 320FX Cryopump was developed specifically to address the challenges of today's Ion Implant processes and provides enhanced hydrogen pumping speed and capacity while maintaining quality, performance and reliability. The On-Board® IS XP Cryopump delivers increased capacity for PVD applications to achieve maximum productivity while maintaining process transparency. Both models feature intelligent "self-adjusting" technology, lower cost of ownership and increased uptime. The On-Board® IS 320FX Cryopump is specified for Ion Implant applications and is optimised for tool throughput with enhanced hydrogen pumping speed and capacity. The On-Board® IS XP Cryopump is specified for PVD applications to deliver increased capacity for maximum productivity and to provide capacity overhead for future process improvements. On-Board IS systems support quickest regenerations in single and multi-pump configurations, operate with low consumption of energy and cooling water without compromising vacuum performance, enable easy system integration and fast production installation, and include enhanced remote monitoring for preventive and predictive maintenance.