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Clean Stocker — CDS350
Murata Machinery, Ltd. (Muratec)
Categories:
Stacker Crane AS/RS
Model Overview
The Clean Stocker — CDS350 is designed for wafer carrier storage in 200mm and 300mm fabs. The stocker provides multiple operator integration, overhead transport, conveyor port systems, and N2/xCDA purging as adaptable features. The CDRX Reticle Stocker configuration combines high-density reticle a...
Technical Specifications
PurgingN2/xCDA purging
Featuresmultiple operator integration,overhead transport,conveyor port systems,N2/xCDA purging (adaptable)
Intended Forwafer carrier storage in 200mm and 300mm fabs
ConfigurationCDRX Reticle Stocker
Capacity Reticlesup to 1,920 reticles
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