PCT-150CRS

Overview

The PCT-150CRS (2C-2D) is a coater and developer tool set for photolithography processing designed for high productivity in mass production. Key features include Dual Tracks for Mass Production (2 Coaters, 2 Developers), dual wafer size auto change, a shuttle robot arm with dual or triple end-effector handlers, stacked up modules, dual PCs and monitors, PLC controllers, and SECs/GEM compliance. The system emphasizes high reliability, high throughput, footprint reduction, user-friendliness, and flexible process flow and is designed for easy maintenance, chemical conservation, and energy efficiency. The PCT-150CRS is intended for photolithography processing in high-productivity mass production. Its Dual Tracks configuration (2 Coaters, 2 Developers), dual wafer size auto change, and shuttle robot arm with dual or triple end-effector handlers support flexible process flow and high throughput.