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Nanoquest I IBSD Combo
Intlvac Thin Film Corporation
Model Overview
The Nanoquest I IBSD Combo deposits and etches on 100mm diameter substrates and smaller. It is a compact tool which brings premium PVD deposition to thin film fabrication and provides full ion beam etch capability. The technology sputters at low pressure metals & dielectrics without powered cathodes...
Technical Specifications
No specifications available
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