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AJA International, Inc.Orion IMS Series Ion Milling Systems

Orion IMS Series Ion Milling Systems

AJA International, Inc.

Categories:
Abrasive Machining
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Model Overview

AJA ATC Orion Series Ion Milling Systems are described as durable, compact tools with cylindrical chambers and a large hinged door for ease of access. The system utilizes a substrate holder with up to 4" wafer handling and can provide azimuthal rotation, motorized tilt adjustment, and cooling capabi...

Technical Specifications

Ion Energy50-1200 eV
Substrate Holderup to 4” wafer handling with various capabilities including azimuthal rotation, motorized tilt adjustment, and cooling capabilities (H2O, LN2, Backside Gas Cooling)
Phase Ii-au Display22” articulating screen with wireless keyboard and mouse
DC Source Typical Usenon-reactive milling (Ar only) and include exposed filament neutralization
Aja Uno Series Capacityaccommodate substrates up to 4" in Ø with water cooling, rotation, and tilt up to +/- 180°

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