ReticleSense® Auto Teaching System™ (ATSR)

Overview

ReticleSense® Auto Teaching System™ (ATSR) is a wireless, reticle-shaped, battery-powered teaching device available in 6 reticle shaped form factor. The unit has a reticle quartz housing compatible with most mask equipment and scanners, a lightweight reticle-like mass and mass distribution of 230 gms ±10%, and a body thickness of 6.35 mm in the standard 6 reticle format. An on-board camera reports x-y-z offset from teaching to edges inside the equipment so you can teach reticle transfer coordinates with 5 cameras, and provides color images with white light illumination at a working distance of 38 mm to 42 mm. Measurement repeatability is 0.025 mm at nominal focus* and accuracy is 0.050 mm at nominal focus*. Environmental and system specifications include operating pressure <10-6 to 760 torr and operating temperature 20 to 60 degrees C. The system uses Bluetooth wireless communications, supports Windows 10, includes CyberSpectrum software that displays real-time video and measurements, logs offsets and user comments, and replays log file data for review and analysis. Product components listed are: teaching device, charging clean case, carrying suitcase, and accessory communication gateway; battery operation is less than 2 hrs. per charge and factory recalibration is recommended annually. Capture three-dimensional offset data (x, y and z) in real time to teach reticle transfer positions for proper alignment and set-up of semiconductor tools. The ATSR provides real-time images as robots move the device through a tool to support visual inspection and to search for lost wafers and pedestal debris without opening the tool. Use the ATSR calibration to achieve repeatable and reproducible semiconductor equipment setups and to eliminate technician-to-technician variation. Its wireless and vacuum-compatible design allows inspection while keeping equipment sealed, helping reduce equipment downtime and lower manpower and consumable expense.