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Producer® Pyra® Anneal
Applied Material
Categories:
Low Pressure Chemical Vapor Deposition (LPCVD) Systems
Atmospheric Pressure Chemical Vapor Deposition (APCVD) Systems
Model Overview
Producer® Pyra® Anneal is an Applied Materials rapid thermal processing (RTP) anneal system for semiconductor manufacturing, specified for performing rapid-thermal-processing treatments in device fabrication. It is presented within Applied Materials’ Modify product family for rapid thermal processin...
Technical Specifications
Processrapid thermal processing (RTP) anneal
Capabilitycontrolled, rapid thermal anneal
Applicationrapid-thermal-processing treatments in device fabrication
Category PathSurface Treatment > Chemical Vapor Deposition (CVD) > Thermal CVD Systems > Low Pressure Chemical Vapor Deposition (LPCVD) Systems
Product FamilyModify
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