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KS-FT200/300 200/300mm coater&developer for IC manufacturing
King Semi
Categories:
Automated Optical Inspection Systems
Model Overview
High throughput architecture and small footprint. Supports inline operation with various photolithography tools. Reduced photoresist consumption for lower CoO. Optional high-precision hot plate, WEE, AOI and other functional units for better process control. Modular design for flexibility of customi...
Technical Specifications
Footprintsmall
Wafer Size200/300mm
Throughputhigh
ApplicationIC manufacturing
Category PathTest & Measurement > Optical & Visual Inspection > Automated Optical Inspection Systems
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