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VON ARDENNE GmbHDual Anode Sputtering (DAS)

Dual Anode Sputtering (DAS)

VON ARDENNE GmbH

Categories:
High Power Impulse Magnetron Sputtering Systems (HiPIMS)
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Model Overview

Dual Anode Sputtering (DAS) is an industrially proven coating technology. It can be applied for ceramic processes with materials such as niobium oxide (NbOx), titanium oxide (TiOx) or intrinsic tin oxide (i-ZnO). With reactive process control, DAS sputtering achieves high deposition rates in the tra...

Technical Specifications

Patentedtrue
TechnologyDual Anode Sputtering (DAS)
Category PathSurface Treatment > Physical Vapor Deposition (PVD) > Sputtering Systems > High Power Impulse Magnetron Sputtering Systems (HiPIMS)
Anode Cleaningperiodic cyclic cleaning
Powering ModesAC-MF,DC powering
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