Sapphire Substrate Mounter　ATM-8100 Series

Overview

Tape is attached to the substrate in a vacuum, enabling bubble-free application. This is a pressure differential-based application method, and there is no stress on the wafer. The ATM-8100 Series supports thin membrane φ3, 4, 5, 6 inch substrates with thin films of 100 m or less. The series supports a function that reads wafer IDs and issues barcodes (option). Customized specifications can be created to meet client requests. Attach tape to substrates in a vacuum to achieve bubble-free application while avoiding stress on the wafer. Handle thin membrane φ3, 4, 5, 6 inch substrates with thin films of 100 m or less. Optionally read wafer IDs and issue barcodes when the barcode function is selected.