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SHANGHAI ROYAL TECHNOLOGY INC.Aluminum Oxide Copper PVD Plating Machine, PVD Copper Plating on Ceramic Sheets, Copper Deposition System

Aluminum Oxide Copper PVD Plating Machine, PVD Copper Plating on Ceramic Sheets, Copper Deposition System

SHANGHAI ROYAL TECHNOLOGY INC.

Categories:
High Power Impulse Magnetron Sputtering Systems (HiPIMS)
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Model Overview

The RTAS900 is a production-scale PVD deposition system engineered for copper and other metal coatings on ceramic sheets and related substrates; marketed under the ROYAL brand and configured as an Aluminum Oxide Copper PVD Plating Machine. The system accepts MF/DC sputtering and steered arc cathodes...

Technical Specifications

MfcMass Flow Controller ( 4 ways )
Moq1 set
Door2 sets, front and back, SUS304 material
Power3 Phase 380V 50Hz(60Hz), 130kVA, average power consumption: 60KW
ExhaustVent for mechanical pumps

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