PCT-150RRE

Overview

The PCT-150RRE Dual Tracks System is a linear track system with dual random robot arms; each robot arm is equipped with two end-effectors and moves along modules located at the front and rear of each track. The system provides flexible process capabilities, re-configurable modules, and automatic changeability for dual wafer sizes. It includes process monitoring and operator convenience features, plus special functions for process editing and database sharing via export/import. The platform is engineered for high reliability, high throughput, footprint reduction, user-friendliness, and flexible process flows, and it supports various interface tools and complies with SECs/GEM management standards. The design emphasizes easy maintenance, chemical conservation, and energy efficiency; technical specifications are available at https://www.picotrack.com/_files/ugd/e1e5bb_0e86c231a21a4341902a4f4cf7b93814.pdf. The PCT-150RRE is described as suitable for a wide range of wafer products in manufacturing. Its automatic changeability for dual wafer sizes and re-configurable modules support handling different wafer sizes, and its process monitoring plus process editing and database export/import capabilities support process configuration and data sharing within manufacturing operations.