SC-80EX

Overview

SC-80EX is an 80EX spray coater for flexible, optimized coating of MEMS and devices with 3D structures, supporting a wide variety of uses from research and development to large-scale production. Wafer size: φ100mm - φ200mm. Transfer system: Robot transfer. Processing system: Spray coating with wafer temperature control function. Spray nozzles: Chemical: up to 2 nozzles; Solvent: 1 nozzle. Screen's proprietary spray coating technology enables stable, uniform processing of resist and protective films on uneven stepped and through-hole substrates. The system coats low viscosity resist by multiple scans to create thick films while significantly reducing chemical consumption compared to a spin coater. The spray coater incorporates a proprietary transfer system and multiple processing units to achieve high throughput, and its structure is designed for simple maintenance with easier exchange of parts and a control mechanism to limit mist dispersal and minimize contamination inside the spray coater. The SC-80EX is intended for production processes for MEMS, SAW and power devices that require improved handling of pattern formation and material coating of devices with 3D structures. It is used to apply resists and protective films on devices with 3D structures, including stepped and through-hole substrates, and to spray low viscosity resist in multiple scans to form thick films with reduced chemical consumption compared to spin coating. The system supports applications ranging from research and development to large-scale production and high-throughput processing by using robot transfer and multiple processing units.