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LION Linear Ion Source
VON ARDENNE GmbH
Categories:
Ion Beam Sputtering Systems
Model Overview
LION Linear Ion Source is an industrial linear ion source for generating a homogeneous, line-shaped ion beam inside vacuum processing equipment. It supplies energetic ions for surface preparation and modification tasks such as ion cleaning, ion-assisted deposition, and ion etching/sputter assistance...
Technical Specifications
Beam Shapeline-shaped
Operates Asprocess-stage device
Beam Profilehomogeneous
Consumablesion-emitting elements
Integrationdesigned for integration into vacuum-coating systems
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