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ALLIANCE CONCEPTCLUSTERTOOL, Thin Films Deposition Cluster

CLUSTERTOOL, Thin Films Deposition Cluster

ALLIANCE CONCEPT

Categories:
High Power Impulse Magnetron Sputtering Systems (HiPIMS)
Electron Beam Evaporation Systems
Thermal Evaporation Systems
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Model Overview

The CLUSTERTOOL range is a latest system of thin films deposition resulting from a 25 year-experience in the design of special PVD equipment. The main element of the machine’s architecture is the Vacuum Transfer Robot developed by Alliance Concept Engineering Department; the maximum capacity of the...

Technical Specifications

Coating ChamberCT100: AC450 and/or DP650; CT200: AC450,DP650,DP850,RIE,EVA or tailor-made
Load-lock ChamberCT100: Manual; CT200: Automatic single plate or semi K7
Coating Surface UniformityCT100: ± 2%; CT200: ± 2%
Usable Coating Surface (mm)*CT100: Ø200; CT200: Ø200 and Ø300

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