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Oerlikon Balzers Coating USA Inc.DOMINO

DOMINO

Oerlikon Balzers Coating USA Inc.

Categories:
High Power Impulse Magnetron Sputtering Systems (HiPIMS)
Cathodic Arc Systems
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Model Overview

DOMINO is a modular thin film PVD equipment platform combining multiple technology modules for individual demands, developed with nearly 30 years of experience in the tool manufacturing industry. The modular and flexible concept allows further expansions and upgrades and offers efficient system solu...

Technical Specifications

Peak Densitiesup to 1500 W/cm2
High Deposition Rates> 5 µm/h
Higher Deposition Rateup to factor 2 compared to DC or HiPIMS
DC And Mf Power Suppliesup to 350 kHZ for depositing oxide layers without target poisining
Low Deposition Temperatures< 100 °C

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