Coating Machine for Magnetron Sputtering MF

Overview

Model "Машина для нанесения покрытий с магнетронным напылением MF" is a vacuum PVD (Physical Vapor Deposition) system that implements magnetron sputtering and is described for deposition of single-layer thin films with high adhesion and reproducible production properties. The machine construction and capabilities explicitly include arc evaporation and magnetron sputtering and are said to produce films that increase gloss, hardness, wear resistance, corrosion resistance, antibacterial properties and dielectric properties of substrates. Documented process steps for the MF system are: introduction of process gas into the vacuum chamber; generation of plasma by applying an arc/voltage; ion bombardment to clean/activate the target and substrate; target sputtering that releases atoms; formation and deposition of the film onto substrates; control of layer thickness; cooling and unloading of the chamber. Technical parameters and equipment listed for the MF system include pumps: Mechanical pump + Roots pump + diffusion pump + holding pump (optional: cryogenic pump, cryogenic pump system); gas system: 1-4 lines; ultimate vacuum: 6×10^-4 Pa; operational gas condition cited as 5×10^-4 Pa in 30 minutes; target capacity: Arc targets 6-18 sets, Magnetron targets 1-2 sets; listed energy sources include DC power supply, medium-frequency power supply, activator power supply and pulsed bias power supplies; operation/control modes noted as manual, semi-automatic, fully automatic and PLC. Explicitly listed decorative applications include jewelry, watches, sanitary/plumbing fixtures and architectural hardware. Functional and industrial applications shown include wear‑resistant coatings for cutting tools and other tools and anti‑corrosion coatings for marine equipment. The MF system is also presented for electronics (thin conductive/semiconducting films for chips, displays and circuits), optics (anti‑reflective films, mirror and protective layers for lenses and solar panels) and automotive use (decorative and protective coatings for exterior trim and panels).