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Intlvac Thin Film CorporationNanoquest I Ion Beam Etching & Deposition System

Nanoquest I Ion Beam Etching & Deposition System

Intlvac Thin Film Corporation

Categories:
Subtractive Manufacturing
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Model Overview

The Nanoquest I Ion Beam Etching & Deposition System by Intlvac Thin Film is an ion beam development platform designed for research and development and supports both etching and thin film deposition. The system provides independent control of ion energy, ion current density, and beam incidence angle...

Technical Specifications

Rotation0–45 RPM with offset control for uniform results.
Control InterfaceAutomation is handled via a LabVIEW-based interface, offering complete system management within an intuitive Windows environment.
Integrated ShutterPneumatically operated with optional beam current probe.
Vacuum PerformanceAchieves 1×10⁻⁶ Torr in under 30 minutes and reaches 5×10⁻⁸ Torr in 24 hours using dry pumps and either a Cryopump or Maglev Turbo Pump.
Water-cooled StageDirect cooling ensures thermal stability throughout processing.

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