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AJA International, Inc.2036 IMS Series Ion Milling Systems

2036 IMS Series Ion Milling Systems

AJA International, Inc.

Categories:
Abrasive Machining
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Model Overview

AJA International Inc. 2036 Ion Milling Systems are box-style chambers built in a variety of configurations and feature a heavy duty double hinged front loading door for access and maintenance. The system utilizes substrate holders that support up to 8" wafer handling with azimuthal rotation, motori...

Technical Specifications

Ion Energy50-1200 eV
Wafer Handlingup to 8”
Ion Source Size8-22cm
Bsg-200 Featuresdesigned to handle wafers or similar planar substrates up to 200 mm in diameter and features direct backside He, Ar or N2 gas cooling while rotating; peripheral weight ring to maintain higher backside gas pressure; load-lock compatible
Ion Source Typesgridded or gridless DC/RF ion source; DC/RF Kaufman style or capacitively/inductively coupled RF ion sources with grounded grids

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