MF Magnetron Sputter Coating Machine

Overview

Machine de revêtement par pulvérisation magnétron MF is a medium-frequency magnetron cathodic sputtering coating machine that implements Physical Vapor Deposition (PVD) to produce uniform, high-adhesion thin films on various substrates. The system supports multiple coating technologies including arc evaporation and magnetron sputtering and is designed for multitarget operation; medium-frequency power minimizes arc discharges and makes the system suitable for coating insulating or ceramic targets. The MF sputtering process uses a medium-frequency electrical power source to generate a stable plasma in a vacuum chamber with argon introduced as the inert gas, where argon ions bombard the target, eject atoms, and those atoms deposit as a dense, high-quality film on the substrate. The process sequence described includes substrate preparation, vacuum pumping to as low as 6×10^-4 Pa, controlled gas injection via 1-4 paths, plasma ignition, cathodic sputter deposition with thickness control by adjusting duration/power/gas flow, and controlled cooling and unloading. Hardware and configuration details provided include pumps: mechanical pump + Roots pump + diffusion pump + maintenance pump (optional: cryogenic pump, cryogenic pump system); energy sources: Alimentation en courant continu, medium-frequency power supply, heating supply, activation supply, pulsed bias voltage supply; target types: DC magnetic target, twin medium target, airplane target; target series: Arc: 6-18 series; Magnetron: 1-2 series; a time-to-vacuum metric of 5×10^-4 Pa in 30 minutes; and control options of Manual, semi-automatic, fully automatic, and PLC. The machine is used for decorative finishes, electronics manufacturing, optical components, surface improvement of tools and molds, and automotive parts that require high wear and corrosion resistance. Specific applications listed include decorative coatings for jewelry, watches, bathroom accessories and architectural hardware; functional wear-resistant coatings for cutting tools and corrosion-resistant coatings for marine hardware; thin conductive or semiconductor layers for chips, screens and circuits; and optical films such as antireflective coatings, mirrors and protective layers for lenses and solar panels.