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RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System
SHANGHAI ROYAL TECHNOLOGY INC.
Model Overview
Vertical vacuum thin-film coating system configured with a front-and-back 2-doors chamber sized Φ1200*1300mm (H) fabricated in Stainless Steel (S304). Combines Magnetron Sputtering and Ion Source PECVD technologies; deposition sources listed as 2 pairs DC/RF Sputtering Cathodes + (2 pairs spare usin...
Technical Specifications
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