CRYO-FIB-SEM CryoLameller

Overview

CRYO-FIB-SEM CryoLameller is a combined focused ion beam (FIB) and scanning electron microscope (SEM) system configured for cryogenic operation with an integrated cooling stage and anti-contamination measures. The system uses liquid nitrogen as the coolant and implements thermal conductivity cooling for the stage. A Pt sputter coating system is built into the specimen exchange chamber and an anti-contamination device is incorporated in both the SEM column and the specimen chamber. FIB optics: beam current 1 pA to 90 nA; accelerating voltage 1.0 to 30.0 kV; FIB image resolution 4.0 nm (30 kV). SEM optics: beam current 1 pA to 300 nA; landing voltage 0.1 to 30.0 kV; SEM image resolution 1.6 nm (15 kV, WD 4 mm) and 3.0 nm (2 kV, WD 8.5 mm). These ranges support low-dose imaging and higher-current material removal within the same instrument. Cryogenic stage performance: Coolant: Liquid nitrogen. Cooling temperature: Stage: -160 0C or lower; Anti-contamination device: -180 0C or lower. Cooling retention time: 13 hours or more. Movement range of the cooling stage: X: 20 mm; Y: 30 mm; Z: 4 to 40.5 mm; T: -40 to 700; R: 3600 more (-190 to 1900). Designed for cryogenic FIB milling and SEM imaging workflows, the CryoLameller is suitable for site-specific cryo-lamella preparation and inspection where maintaining sub-zero sample temperatures and minimizing contamination are critical. Integrated Pt sputter coating allows conductive coating during specimen exchange, while the anti-contamination devices and long cooling retention time (13 hours or more) support extended cryo-preparation sessions. Typical operational contexts include research and development laboratories and cryo-focused sample preparation facilities in structural biology and advanced materials R&D that require both low-dose imaging (SEM at down to 0.1 kV landing voltage and 1 pA beam currents) and higher-current milling (FIB up to 90 nA and 30.0 kV). The stage motion ranges and rotational/tilt capability (T: -40 to 700; R: 3600 more (-190 to 1900)) enable precise positioning and angular access for lamella thinning and cross-sectioning under cryogenic conditions. Operational implications: the system requires a liquid nitrogen supply and a workflow that leverages integrated contamination control and in-chamber sputter coating to preserve sample integrity during multi-hour cryo-preparation and transfer steps.