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Leybold GmbHUNIVEX C Cluster & Custom Deposition Systems

UNIVEX C Cluster & Custom Deposition Systems

Leybold GmbH

Categories:
High Power Impulse Magnetron Sputtering Systems (HiPIMS)
Electron Beam Evaporation Systems
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Model Overview

UNIVEX C Cluster & Custom Deposition Systems are modular systems supplied for special applications and are offered as UNIVEX C - CLUSTER and UNIVEX C - CUSTOM variants based on the UNIVEX modular concept. The systems provide a programmable, recipe-controlled process sequence and are described as hav...

Technical Specifications

VariantsUNIVEX C - CLUSTER,UNIVEX C - CUSTOM
Automationfully automatic operation including recipe processing
Architecturemodular
Category PathSurface Treatment > Physical Vapor Deposition (PVD) > Sputtering Systems > High Power Impulse Magnetron Sputtering Systems (HiPIMS)
Vacuum Systemgenerally each vacuum chamber has its own high vacuum system
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