Cluster

Overview

Cluster: each chamber can be designed to meet specific requirements by combining different processes (eg Sputtering, Evaporation, e-beam…). These systems are multifunctional, expandable, modular and therefore very flexible. A cassette-to-cassette load lock is connected to a transfer module from which samples can be moved up to the process chamber and is interconnected to an automated central chamber capable of handling multiple samples on each module, always maintaining vacuum. The number and type of module depend on customer needs and process requirements. These are therefore systems designed and created to measure. The cassette-to-cassette load lock and transfer module enable automated movement and processing of multiple samples while maintaining vacuum during transfers. The modular architecture allows selection of the number and type of modules according to customer needs and process requirements. Combined-technology PVD systems from the same product family are described as easy to use and highly performing and are indicated as a solution for academic and industrial, research and training laboratories.