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SAM Auto Tray
PVA TePla AG
Model Overview & Specs
Overview
SAM Auto Tray is a customer-specific solution for inline process diagnostics and process control. It provides inline inspection for JEDEC trays. The system supports full tray scanning and is equipped for multiple transducers along with optimized tray handling. It includes cleanroom compatibility up to class 10, integrated data analysis and automation, software and fab communication via SECS interface, a degassing system for process water, and automatic water change with conductivity monitoring. Primary applications include the detection of voids, inclusions, and delaminations in bond interfaces and the identification of layer thickness variations in multilayer structures. In mass production where high throughput is essential, proprietary software supports simultaneous inspection of multiple layers. The system is designed for inline process diagnostics and process control and can be integrated into any production environment while enabling inline inspection for JEDEC trays and operation in cleanrooms up to class 10.
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