DLC1500PLUS DLC Coating Equipment

Overview

Batch vacuum coating system for Diamond-Like Carbon (DLC) films on tools and mechanical parts. Dual-mode process platform: Magnetron Sputtering (MS) combined with either Plasma Enhanced Chemical Vapor Deposition (PECVD) or an Anode Layer Ion Source, within a 2 m3 304 stainless steel chamber. The chamber integrates four magnetron sputtering cathodes and one ion source (anion+cation). Typical sequence: plasma-enhanced surface etching, transition layer deposition (chromium, tungsten carbide, or titanium) by MS, then DLC (a-C:H) deposition via PECVD or the Anode Layer Ion Source. The Anode Layer Ion Source option extends capability to produce products with complex geometries. Footprint L4900*W2000*H2750. Work envelope and throughput: accepts workpieces up to max dia.350 mm shaft within an effective coating area dia.940*1000 mm; maximum loading weight 1000 kg; loading capacity by number of trees is made-to-order. Processing time per batch 6~8 h with deposition rate >1 um/h. DLC stack (Substrate/Cr/WC/DLC a-C:H) at 2-4 um thickness achieves ~2500 HV hardness, HF1 adhesion, friction coefficient <=0.1, black finish. Utilities, process gases, and core components: - Electrical: 3*380/220V (3L+N+PE), 50/60 Hz, 125 A, 85 kW; Electric Power Supply Avg (kW/h): 25; Electric Power per batch duration: ~6h (subject to process). - Process gases: Ar/N2/H2/C2H2 at 1.0-1.2 bar; consumption per batch (Ar) 60L, (N2, 1) 180L, (C2H2) 12L, (N2, 2) 250L. - Cooling water: max heat discharge 100 kW, flow 150 L/min, Cooling Water Temp. 22~26 °C, pressure 5-5.5 bar, Cooling Water Consumption per batch ~12 L. Compressed air 5-6.5 bar. - Vacuum system: Leybold molecular pumps (qty 3) 2200 L/s, limit pressure <10-8 mbar; backing pump FeiYue VSV-300+VBP-1200 (rotary vane + Roots) 1200 m3/h, limit pressure 1*10-2 mbar; KYKY plug valves DN250, leak rate 1.3*10-10 Pa*m3/s; INFICON ionization and resistance vacuum gauges. - Power and motion: Bias power supply Huttinger DC4020 20 kW, DC1200 V, 2~100 KHz, duty 10~100%, 66.7 A; cathodes (qty 4) L1200*W100*T10 mm with baffles; ion source (hot filament) 400 A; workpiece rotation via variable frequency motor 1-3 r/min, magnetic fluid seal, bearing 1000 KG; temperature control 24 kW heater, PID control. - Controls and instrumentation: Beckhoff IPC/PLC automation; Azbil flow meters (Ar/N2/C2H2); SMC pneumatic and cooling control components. Equipment advantage: high production efficiency, large output, and capability for complex geometries. Shares the same footprint as the DLC1500 model. Batch DLC coating of mixed part families where both standard cylindrical tools and complex-shaped components are processed in production environments. The dual-mode MS+PECVD / MS+Anode Layer Ion Source platform supports conformal DLC (a-C:H) coatings on complex geometries while maintaining high-throughput batching for cylindrical shafts up to dia.350 mm within an effective dia.940*1000 mm coating zone and up to 1000 kg loads. Applicable when a Cr/WC/a-C:H stack at 2-4 um thickness with ~2500 HV hardness, HF1 adhesion, and friction coefficient <=0.1 is required. Typical factory deployments leverage 6~8 h batch cycles, multi-tree fixtures (made-to-order), and existing plant utilities (3*380/220V power, Ar/N2/H2/C2H2 gases, cooling water, and compressed air). The configuration with the Anode Layer Ion Source is selected for products with complex geometries, while PECVD mode covers conventional part shapes and high-volume output within the same system footprint.