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TEMS 1400H

Vergason Technology, Inc.

Categories:
Thermal Evaporation Systems
Equipment view 1Equipment view 2

Model Overview

TEMS 1400H Thermal Evaporation Metalizing System uses a PLC-based architecture with an Allen-Bradley Compact Logix PLC and Allen-Bradley Panelview Plus 1500, with password-protected access for authorized technicians and VPN Remote Ethernet access for online diagnostics or troubleshooting. Tooling c...

Technical Specifications

Power480 V three phase 50/60 Hz 200A 70kW; 400 V three phase 50/60Hz 200A 70kW; 380 V three phase 50/60Hz 200A 70kW; Compressed air operated valves, dry air vent optional. Chilled water required 15GPM
Pump PackageOerlikon Leybold Vacuum SV630 Mechanical Pump; Oerlikon Leybold WH4400 Roots Blower; Agilent Technologies HS-20 Diffusion Pump with Thermocouple and Pump Cart
System Weight10,000 pounds (est.)
System ControlAllen-Bradley Compact Logix PLC; Allen-Bradley Panelview Plus 1500; VPN Remote Ethernet access
Substrate TypesAll vacuum stable plastics

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