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Nanochrome™ V: Advanced Sputtering System
Intlvac Thin Film Corporation
Model Overview
The Nanochrome™ V is a plasma-assisted evaporation and sputtering system with a stainless steel clam shell deposition chamber measuring 48” diameter x 40” height. Substrates are mounted on a rotatable 500mm OD disk that supports parts up to 20kg and can be loaded via manual or automatic substrate lo...
Technical Specifications
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