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Nanochrome IV IBSD
Intlvac Thin Film Corporation
Model Overview
The Nanochrome IV IBSD deposits on 250mm diameter substrates and smaller and can be configured for load lock or batch open to air substrate loading. Its sputter up geometry provides low-particle PVD deposition capability for thin film fabrication. The system is equipped with a multi-target, water-c...
Technical Specifications
No specifications available
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