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Aegis DLC
Intlvac Thin Film Corporation
Model Overview
The Intlvac Aegis Diamond-Like Carbon (DLC) PECVD system uses plasma-activated, low-temperature chemical vapor deposition (PECVD) technology and includes pre-set recipes for Infrared Anti-Reflection coatings on Silicon and Germanium optics. The system features a compact design with innovative energy...
Technical Specifications
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