LEYBOLD OPTICS IBS series

Overview

The LEYBOLD OPTICS IBS series is a precision optics vacuum coater offering ion-beam sputtering to produce extremely low-loss optical coatings. The system can process up to three different target materials simultaneously within the processing chamber and is capable of coating diameters of up to 600 mm; the IBS 1400 supports substrates up to 400 mm diameter while the IBS 1600 supports a maximum diameter of 600 mm. The ion beam sputtering technology combined with a drive system inside the processing chamber yields minimal defect generation and low scatter values while allowing components to be optimally oriented for improved coating performance. The series integrates the Leybold Optics OMS 5100 on-substrate optical monitoring system for exact termination of every deposited layer, achieves high uniformity and low particle generation without masks or shutters, and an automated load-lock system can be added to the IBS 1400 HP to load substrates without breaking the vacuum. An example dielectric laser mirror produced on the IBS series reflects higher than 99.99% with a center wavelength at 632nm. The IBS series is used to produce high-precision optical coatings for laser optics, gyroscopes, metrology, microscopy, telecom and other demanding applications. It supports coating of curved and large substrates up to 600 mm diameter and simultaneous processing of up to three target materials to meet challenging production requirements. On-substrate optical monitoring (OMS 5100) enables exact layer termination for demanding mirror and filter specifications, and an automated load-lock option for the IBS 1400 HP permits loading substrates without breaking the processing chamber vacuum.