SS-80EX

Overview

The SS-80EX is a Spin Scrubber described as an advanced scrubber featuring the same stability and reliability as the highly regarded SS Series and includes icons labeled 100mm-200mm and AQUASPIN. High-speed processing of up to 160 wafers per hour is stated, representing a 111% increase over current SCREEN models. * May vary according to system configuration and processing conditions. The entire control system has been redesigned and now features a specialized GUI that provides simpler and more intuitive handling and improves the processing efficiency of daily operations. A proprietary detachable chamber design is described as dramatically cutting downtime by allowing maintenance procedures such as brush and pin replacement or cup cleaning to be performed on stopped chambers while the others continue to operate. Six types of highly reliable and proven cleaning tools are available, and an enhanced bevel cleaning function provides high-precision movement and control of brushes that has been proven effective for improving yield rates; the basic two head specification can be expanded to accommodate up to six heads according to space and performance requirements. The SS-80EX is presented for high-speed wafer processing, with stated throughput of up to 160 wafers per hour. It is described as supporting a variety of cleaning tasks via six types of cleaning tools and an enhanced bevel cleaning function intended to improve yield rates, and its detachable chamber design allows maintenance on stopped chambers while other chambers continue to operate; the system can be configured from a basic two head specification up to six heads to adjust capacity.