SM-92100EUVC EXCIMER UV CLEANER

Overview

SM-92100EUVC is an excimer UV cleaner that irradiates specimens with 172 nm UV and is supplied with a diaphragm type dry vacuum pump for vacuum-assisted operation. Irradiation time is adjustable from 10 seconds to 99 minutes. Maximum specimen mass is 1 kg and maximum specimen size is 105 mm (W) × 105 mm (D) × 70 mm (H). Operating environment limits are 60% (RH) or less (no condensation) and room temperature 15 to 30 ℃. Installation power requirement is Single phase 90 to 110 V AC, 50 / 60 Hz, 500 VA. Main unit dimensions and weight (cables and vacuum pipes not included): 39 cm (W) × 50 cm (D) × 32 cm (H), approximately 22 kg. Vacuum pump dimensions and weight: 50 cm (W) × 20 cm (D) × 30 cm (H), approximately 9 kg. Regular replacement parts include UV lamp, vacuum gauge, O-ring, etc., to be replaced every time cumulative irradiation time reaches 1000 hours. Designed for industrial laboratory and production workflows that require excimer UV cleaning of small parts and specimens, the unit is suited to processes where high-energy 172 nm UV exposure under vacuum is used to remove or treat surface contaminants. Typical operation is: place a specimen up to 105 mm × 105 mm × 70 mm and 1 kg, close the chamber, set an irradiation time between 10 seconds and 99 minutes, and run the diaphragm-type dry vacuum pump within the specified environmental limits (60% (RH) or less, 15 to 30 ℃). The compact main unit and separate vacuum pump allow flexible bench or hood installation where a single phase 90 to 110 V AC supply is available; plan preventive maintenance by replacing the UV lamp, vacuum gauge and O-rings at 1000-hour irradiation intervals.