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Nanoquest PICO

Intlvac Thin Film Corporation

Categories:
Subtractive Manufacturing
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Model Overview

The Intlvac Nanoquest Pico is a compact ion milling platform for research and development of thin film applications such as Data Storage, Spintronics, and Semiconductors. The system has a 14” D-shaped chamber, with a brochure version listing a 16” D-shaped chamber, and is described as having a small...

Technical Specifications

Chamber14” D-shaped chamber
Substrate SizeUp to 100mm diameter
1cm DC Ion Source10mA beam current; Up to 500eV ion energy
4cm DC Ion SourceUp to 120mA beam current; 1200eV ion energy; Filament neutralizer
8cm DC Ion Source250mA beam current; 100–1200eV ion energy; Filament neutralizer

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