Filmetrics R50-4PP Four-Point Probe System and Filmetrics R50-EC Eddy Current System

Overview

The Filmetrics R50 family is offered in contact four‑point‑probe (R50-4PP and R50-200-4PP / R54-200-4PP / R54-300-4PP) and non‑contact eddy‑current (R50-EC and R50-200-EC / R54-200-EC / R54-300-EC) sensor configurations. Sensor types: Contact 4PP for direct resistivity measurement; Non‑contact eddy current for capacitive/inductive sheet‑resistance measurement without probe contact. XY stage travel options are provided up to 300mm (high precision X-Y stage provides travel up to 300mm). Several stage formats are listed: 100mm x 100mm, 200mm round, 200mm x 200mm and 300mm round*. Maximum map diameters follow the stage formats: 100mm, 200mm or 300mm. Automated X-Y stages are available for applicable configurations.* Primary use is quantitative sheet‑resistance measurement and spatial mapping of conductive and semi‑conductive thin films. Contact 4PP configurations deliver the widest dynamic range (4PP sheet resistance measurement spans a ten‑decade range on conductive and semi‑conductive films; measurement range listed for 4PP variants as "1m\u00039/sq \t6 200M\u00039/sq"), while non‑contact eddy‑current variants target non‑contact measurements (measurement range listed for EC variants as "1m\u00039/sq \t6 50\u00039/sq"). Typical workflows include automated X‑Y mapping across wafers or substrates up to 300mm diameter, with Z handling that includes a 60mm sample Z range with coarse and fine height control and adjustable approach speed; maximum sample height capability depends on model (examples listed as 100mm or 15mm). These configurations support production and manufacturing R&D environments for process control, quality assurance, and thin‑film characterization.