Primatics PDR110

Overview

The Primatics PDR110C rotary tables are direct drive tables featuring a high performance direct drive motor that creates sub arcsecond repeatability and fast settling times. The PDR110C is described as the most compact direct-drive rotary stage on the market, with a compact design that has a smaller footprint than comparable worm drives and 360 degree travel. The stage uses a high efficiency, neodymium servo motor that permits greater acceleration, shorter settling times and less motor heating than other types of direct drive stages, and the motors' high pole count aids in obtaining low velocity ripple even at very low speeds. A platen mounted, high resolution glass scale contributes to high servo stiffness over a wide dynamic range; an oversized cross roller bearing and drivetrain guarantee long, trouble-free operation; the unit includes a hemisphere switch for quick homing; resolution is up to 0.079 arcseconds; accuracy is within +/-5.0 arcseconds; axial load is 10 kilogram axial load. The PDR110C is described as ideal for semiconductor wafer inspection, high speed laser machining, and precision metrology.