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VertaCure XP G2 Vacuum Curing System
Yield Engineering Systems, Inc. (YES)
Categories:
Polymer Processing
Model Overview
Automated batch vacuum curing system with 316L stainless steel vacuum chambers inside an integrated Class 1 (ISO 3) mini-environment and automated wafer handling. Three-zone temperature control and a new PID controller support fast tuning and tight within-wafer and wafer-to-wafer thermal uniformity....
Technical Specifications
Mttr<=4 hours
Uptime>=95%
Coolingforced air (outside of chamber)
Warpage<=3 mm one side
Warranty12 months after acceptance
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