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Vantage® RadOx™ RTP
Applied Material
Categories:
Thermal ALD Systems
Model Overview
Applied Materials Vantage RadOx RTP is a rapid thermal processing (RTP) system intended for semiconductor manufacturing environments. The model name identifies it as an RTP-class tool within Applied Materials’ Vantage product family and is presented as a semiconductor production/R&D system. It is de...
Technical Specifications
Intended Usesemiconductor manufacturing
Process Modeshort, precisely controlled thermal cycles at elevated temperatures
Category PathSurface Treatment > Chemical Vapor Deposition (CVD) > Atomic Layer Deposition (ALD) Systems > Thermal ALD Systems
Equipment TypeRapid Thermal Processing (RTP) system
Product FamilyVantage
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