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Nanoquest II
Intlvac Thin Film Corporation
Model Overview
Nanoquest II is an Ion Beam Etching (IBE) system built on an ultra-high vacuum (UHV) platform with stainless steel construction and active thermal management. It uses a 22 cm RF Inductively Coupled Plasma (ICP) gridded ion source delivering ion energies from 100 to 1200 eV and beam currents exceedin...
Technical Specifications
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