Dektak Pro

Overview

Dektak Pro is the 11th-generation Dektak stylus profilometer using stylus profilometry (contact measurement). The system integrates a unique direct-drive scan stage and Vision64® software with 64-bit parallel processing for accelerated measurement and analysis. Performance claims include unmatched accuracy with better than 4 Å repeatability and the capability for single-nanometer step height measurements, supported by a Low Inertia Sensor (LIS 3). Stylus force ranges are 1 to 15 mg with the LIS 3 sensor and 0.03 to 15 mg with the optional N-Lite+ low force option. Measurement capability includes two-dimensional surface profile measurements with optional three-dimensional measurement/analyses. One measurement head covers 5 nm–1 mm step heights and 0.03–15 mg loads (with N-Lite+ option). Stylus radius options run from 50 nm to 25 µm, with High Aspect Ratio (HAR) tips 200 µm x 20 µm and custom tips available upon request. Sample viewing provides digital magnification with 0.275 to 2.2 mm vertical FOV. Stage configurations include manual 100 mm (4 in.) X/Y with manual leveling, motorized 150 mm (6 in.) X/Y with manual leveling, and motorized encoded 200mm (8in.) X/Y; sample R-Theta stages are available as manual continuous 360 degrees or motorized continuous 360 degrees. The system also includes a self-aligning stylus assembly for fast stylus replacement and new algorithms that improve optical focus and automate step height analysis. Dektak Pro is presented for R&D, process development, and QA/QC tasks and is described as suited to applications such as Microelectronics, Thick film coatings, and Biomaterials. The instrument is positioned to support cutting-edge research and industrial applications by providing high-resolution, repeatable surface profile data. Its two-dimensional profiling (with optional 3D analyses), single-head coverage of 5 nm–1 mm step heights, and low-force capability (0.03–15 mg with N-Lite+) are cited as enabling accurate and responsive measurements in dynamic measurement scenarios while reducing time between scans through direct-drive stage technology and faster software processing.