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INLENIA kila

Oerlikon Balzers Coating USA Inc.

Categories:
Batch Sputtering Systems
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Model Overview

INLENIA kila uses S3p® technology and a magnet system of 4 S3p® Sputter modules, and it incorporates Side‑Etching Technology (SET) for etching. Swing diameter: 700 mm; Coatable height: 400 mm; Max. loading capacity: 600 kg; Number of spindles: Up to 12; Batch load capacity: 12 trees. Operational thr...

Technical Specifications

Width2330 mm
Height2460 mm
Length4430 mm
Weight7000 kg**
EtchingSide-Etching Technology (SET)

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